Micro ElectroMechanical Systems’ (MEMS) – refers to microscopic devices with moving parts (usually between 1 micron and 1 millimeter long), which are capable of performing a specific task. Such technology is widely diffuse, finding applications that spans from the automotive industry, consumer electronics, and healthcare. The MEMS market share was estimated to be around 50 billion US$ in 2018, and rapidly growing.Microfabrication techniques that allow a fine 3-dimensional spatial control are revolutionising the ways we design functional microdevices. Among different fabrication technologies, 2-photon lithography (also known as direct laser writing) is an established technique that combines the advantages of 3D-printing with sub-micron resolution. This tutorial brings together the 5D NanoPrinting consortium members and invited speakers, to present the state-of-the-art on Fabrication and Characterisation Methods at the Micron-/Sub-micron Scale. The tutorial is composed of informative seminars on a range of topics, that will review the current state-of-the-art materials for Direct Laser Writing, document recent progress, and discuss applications.
25 January 2021 at 9:30 CET.
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